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Thin-film metrology for lab
and production

Offline Thin Film Measurement

Benchtop laboratory metrology for R&D and sampling.

Portable PL Metrology Instrument
SE10

Portable PL Metrology Instrument

Defect Mapping Instrument
SE20

Defect Mapping Instrument

EL/PL&Defect Mapping Instrument
SE60

EL/PL&Defect Mapping Instrument

EPL Mapping/AOI/Degradation Integration Instrument
SE68

EPL Mapping/AOI/Degradation Integration Instrument

Hyperspectral EL/PL&Defect Mapping Instrument
SE69

Hyperspectral EL/PL&Defect Mapping Instrument

Hi-Resolution AOI&EPL Mapping Integrated Instrument
SE80

Hi-Resolution AOI&EPL Mapping Integrated Instrument

Multi-functional Thin Film Measurement Instrument
SE100

Multi-functional Thin Film Measurement Instrument

Microscopic Thin Film Thickness Measurement Instrument
SE200

Microscopic Thin Film Thickness Measurement Instrument

Imaging 3D Thin-Film Thickness Measuring Instrument
SE8000

Imaging 3D Thin-Film Thickness Measuring Instrument

3D Optical Profiler with scan platform
SE320

3D Optical Profiler with scan platform

3D Optical Profiler
SE310

3D Optical Profiler