SE80
Hi-Resolution AOI&EPL Mapping Integrated Instrument
Imaging-based 3D thin-film thickness metrology for multilayer structures and uniformity maps. Visualize thickness distribution across an area instead of relying on isolated points — ideal when film uniformity is part of the measurement objective.
High-Resolution AOI and EPL Mapping for PVK Films
SE80 is designed for high-resolution optical inspection of perovskite thin films. The platform combines automated optical inspection with EPL mapping, allowing engineers to compare visible or surface-related defects with luminescence information.
Inspection Functions : AOI inspection, EPL mapping, Defect comparison, Pore analysis, Statistical analysis
Cross-Comparison : A visible surface defect and a luminescence abnormality do not necessarily indicate the same failure mechanism. SE80 allows AOI and EPL results to be compared within the same inspection workflow.
Machine Learning : Machine-learning functionality can be customized. Customer-specific training data is required for model development.
Typical Applications : Perovskite R&D, Thin-film inspection, Surface defect analysis, Process development, Pilot production
