Focus Areas
Key process windows
1
OLED Emissive
Organic emissive 20–80 nm — efficiency & color.
2
TFT Active Layer
a-IGZO 30–100 nm — switching consistency.
3
Touch TCO
ITO 20–150 nm — resistance vs transmittance.
Metrology Table
Process · Film · Range · Value
| Sub-scenario / Process | Film Layer | Thickness Range | Application & Metrology Value |
|---|---|---|---|
| OLED Emissive Layer Deposition | Organic emissive material film | 20 nm – 80 nm | Luminous efficiency, color coordinates and device lifetime |
| TFT Active Layer (IGZO) | a-IGZO film | 30 nm – 100 nm | Switching characteristics and panel pixel-to-pixel consistency |
| Touch Sensor TCO Coating | ITO film | 20 nm – 150 nm | Balances sheet resistance and optical transmittance |
OLED Emissive Layer Deposition
Luminous efficiency, color coordinates and device lifetime
TFT Active Layer (IGZO)
Switching characteristics and panel pixel-to-pixel consistency
Touch Sensor TCO Coating
Balances sheet resistance and optical transmittance
Related
Recommended next steps
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