Inline vs offline metrology: choosing the right stage
Start with the decision you need to make
If the goal is recipe development or infrequent lot checks, offline tools are often enough. If drift must be caught within a coil, panel, or substrate run, inline measurement becomes the better fit.
A practical split
Many fabs keep offline instruments for deep analysis and add inline systems where yield risk is highest. Techcess can help sequence that investment with local demos and support.